JPH01112040U - - Google Patents
Info
- Publication number
- JPH01112040U JPH01112040U JP595488U JP595488U JPH01112040U JP H01112040 U JPH01112040 U JP H01112040U JP 595488 U JP595488 U JP 595488U JP 595488 U JP595488 U JP 595488U JP H01112040 U JPH01112040 U JP H01112040U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- wafer
- light irradiation
- transports
- predetermined position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims 3
- 230000032258 transport Effects 0.000 claims 2
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP595488U JPH0530348Y2 (en]) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP595488U JPH0530348Y2 (en]) | 1988-01-22 | 1988-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01112040U true JPH01112040U (en]) | 1989-07-27 |
| JPH0530348Y2 JPH0530348Y2 (en]) | 1993-08-03 |
Family
ID=31209778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP595488U Expired - Lifetime JPH0530348Y2 (en]) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530348Y2 (en]) |
-
1988
- 1988-01-22 JP JP595488U patent/JPH0530348Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530348Y2 (en]) | 1993-08-03 |